Availability: | |
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2inch
FineWin
Detailed specification:
Item | Sapphire Substrates | |
Size | 2inch, 3inch, 4inch, 6inch | |
Growth Method | KY | |
Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
Orientation | C-plane(0001) off M-axis(10-10) 0.3°,0.5°,1°,1.5°,2°,3° and others | |
Thickness | 430 μm; 500 μm; 650 μm +/- 25 μm | |
Primary Flat Orientation | A-plane(11-20) +/- 0.2° | |
Front surface | Epi-polished, Ra < 0.2 nm (by AFM) | |
Back surface | Epi-polished, Ra < 0.2 nm (by AFM) | Fine ground, Ra = 0.8 μm to 1.2 μm |
TTV | < 15 μm | |
BOW | < 15 μm | |
WARP | < 15 μm | |
Cleaning | Class 100 cleanroom cleaning and vacuum packaging, | |
Packaging | 25 pieces in one cassette packaging or single piece packaging. |