 |
Cutting Angle | X/Y/Z/Y36/Y42/Y46.3/Y48/X112 etc | |
Diameter/size | 2”/50.8mm 3”/76.2mm 4”/100mm | |
Tol(±) | ±0.25mm | |
Thickness | From 100um to 1000um | |
| Dopping | Fe, etc | |
Primary reference flat | 22mm or customized | 32.5mm or customized |
LTV (5mmx5mm) | < 2um | |
TTV | < 10um | |
Bow | ±25um | |
Warp | ≤ 30um | |
PLTV | ≥95%(5mm*5mm) | |
Orientation Flat | All available | |
Surface Type | Fine Griding/Single Side Polished /Double Sides Polished | |
Polished side Ra | ≤1nm | |
Back Side Criteria | General is 0.2-0.5um or as customized | |
Edge Rounding | Compliant with SEMI M1.2 Standard/refer to IEC62276 | |
Crystal physical parameters:
Crystal symmetry | Trigonal, 3m |
Lattice constant, A | a = 5.154 c = 13.783 |
Density, g/cm3 | 7.45 |
Melting point , °C | 1650 |
Curie point , °C | 605 |
Mohs hardness | 6 |
Thermal expansion coefficient, 10-6/ °C | aa = 16 ac = 4 |
Thermal conductivity , mW/cm °C | 46 |
Dielectric Constant (@ 100 KHz) | ea = 54 ec = 43 |
Refractive indices @ 633 nm | no = 2.175 ne = 2.180 |
Pyroelectric Coefficient: | -2.3 10-4 C/°C/m2 |
Applications:
1. SAW grade LiTaO3 wafers are used in the manufacturing of substrates for RF type SAW devices, high frequency filters with a wide bandwidth.
2. SAW filters, resonators, Q switches, optical modulators, acousto-optic switches, etc.
